A surrogate model enables a Bayesian approach to the inverse problem of scatterometry
Heidenreich S, Gross H, Henn M-A, Elster C, Bär Mscatterometry, photomask geometry, surrogate model, polynomial chaos
| Document type | Article |
| Journal title / Source | Journal of Physics: Conference Series |
| Peer-reviewed article | 1 |
| Volume | 490 |
| Issue | - |
| Page numbers / Article number | 012007 |
| Publisher's name | IOPScience |
| Publisher's address (city only) | Bristol & Philadelphia |
| Publication date | 2014-3-11 |
| ISSN | - |
| DOI | 10.1088/1742-6596/490/1/012007 |
| Web URL | http://iopscience.iop.org/article/10.1088/1742-6596/490/1/012007/pdf |
| Language | English |