Uncertainty propagation in computationally expensive models: A survey of sampling methods and application to scatterometry
Heidenreich S, Gross H, Bär M, Wright Lsmart sampling, statistical inverse problem, scatterometry
| Document type | Article |
| Journal title / Source | Measurement |
| Peer-reviewed article | 1 |
| Volume | in press, corrected proof |
| Issue | in press, corrected proof |
| Page numbers / Article number | - |
| Publisher's name | Elsevier |
| Publisher's address (city only) | Amsterdam |
| Publication date | 2016-6-8 |
| ISSN | - |
| DOI | 10.1016/j.measurement.2016.06.009 |
| Web URL | http://www.sciencedirect.com/science/article/pii/S0263224116302901 |
| Language | English |