Publications

Please find below selected publications from EURAMET's European Metrology Research Projects (EMRP and EMPIR) that are related to Mathmet:

Alternative methods for uncertainty evaluation in EUV scatterometry

Heidenreich S, Henn M-A, Gross H, Bodermann B, Bär M

2013

Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 87890T (May 13, 2013); doi:10.1117/12.2020677 8789 (2013) , -

Type:: Proceedings
Project title:: NEW04: Uncertainty: Novel mathematical and statistical approaches to uncertainty evaluation
Name of Call / Funding Programme:: EMRP A169: Call 2011 Metrology for New Technologies
DOI: 10.1117/12.2020677

Forbes ABF, Minh HDM

2013

International Journal of Metrology and Quality Engineering 3 (2013) , 145-150

Type:: Article
Project title:: NEW06: TraCIM: Traceability for computationally-intensive metrology
Name of Call / Funding Programme:: EMRP A169: Call 2011 Metrology for New Technologies
DOI: 10.1051/ijmqe/2012022

Fischer N., Harris P., Smith I., Pendrill L., Allard A.

Type:: Datasets
Project title:: 17SIP05: CASoft: Software to maximize end user uptake of conformity assessment with measurement uncertainty
Name of Call / Funding Programme:: EMPIR 2017: Support for Impact
DOI: 10.5281/zenodo.3895759

Fischer N., Harris P., Smith I., Pendrill L., Allard A.

Type:: Datasets
Project title:: 17SIP05: CASoft: Software to maximize end user uptake of conformity assessment with measurement uncertainty
Name of Call / Funding Programme:: EMPIR 2017: Support for Impact
DOI: 10.5281/zenodo.3909017

Allard A., Pendrill L., Smith I., Harris P., Fischer N.

Type:: Datasets
Project title:: 17SIP05: CASoft: Software to maximize end user uptake of conformity assessment with measurement uncertainty
Name of Call / Funding Programme:: EMPIR 2017: Support for Impact