Nanoscale 2013 is the 10th seminar on Quantitative Microscopy and the 6th Seminar on Nanoscale Calibration, Standards and Methods focusing on nanoscale characterization techniques based on high resolution tactile and optical microscopy, scanning probe microscopy and other high resolution techniques. The NanoScale 2013 seminar is jointly organised by Nanometrology group of the TC Length EURAMET e.V., LNE and PTB.
At the symposium, the results from a variety of EMRP projects will be presented, including:
- Metrology of small structures for the manufacturing of electronic and optical devices (IND17 Scatterometry), which will provide a reference standard to add traceability to scatterometric measurements and make them comparable to microscopic methods. This is important for the optical and semiconductor industries as they depend on component miniaturisation and reliable measurements of small structures.
- Traceable measurement of mechanical properties of nano-objects (NEW05 MechProNo), which will develop measurement traceability for the mechanical properties of nano-objects such as nanoparticles, nanowires and composite materials through the development of test samples, new techniques and improved instruments.
- Traceability of sub-nm length measurements (SIB08 subnano), which will improve the traceability of high accuracy devices such as optical interferometers and capacitive sensors, which are used to make these measurements.
