Determination of optical constants of thin films in the EUV
optical constants, thin film, optical metrology, EUV metrology,
| Document type | Article |
| Journal title / Source | Applied Optics |
| Volume | 61 |
| Issue | 8 |
| Page numbers / Article number | 2060 |
| Publisher's name | Optica Publishing Group |
| Publication date | 2022 |
| DOI | 10.1364/AO.447152 |
| Language | English |