Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement
Coherence scanning interferometry, confocal microscopy, focus variation, surface topography
| Document type | Proceedings |
| Journal title / Source | euspen’s 23rd International Conference & Exhibition |
| Volume | euspenR |
| Issue | - |
| Page numbers / Article number | 1 - 2 |
| Publisher's name | Euspen |
| Publisher's address (city only) | https://www.euspen.eu/knowledge-base/ICE23191.pdf |
| Publication date | 2023-6-12 |
| Conference name | euspen’s 23rd International Conference & Exhibition |
| Conference date | 12-06-2023 to 16-06-2023 |
| Conference place | Copenhagen, Denmark |
| Web URL | https://www.euspen.eu/knowledge-base/ICE23170.pdf |
| Language | English |
| Persistent Identifier | https://www.euspen.eu/knowledge-base/ICE23170.pdf |