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Dataset for the publication "Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements"

Keywords:

finite element analysis, frequency domain mode analysis, bending, mechanical oscillation, diamond, piezoresistive devices, silicon, cantilevers, surface roughness, surface morphology

Document type Datasets
Journal title / Source
Persistent Identifier https://oar.ptb.de/resources/show/10.7795/710.20211125

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Information

Name of Call / Funding Programme
EMPIR 2017: Industry