Dataset for the publication "Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements"
finite element analysis, frequency domain mode analysis, bending, mechanical oscillation, diamond, piezoresistive devices, silicon, cantilevers, surface roughness, surface morphology
Document type | Datasets |
Journal title / Source | |
Persistent Identifier | https://oar.ptb.de/resources/show/10.7795/710.20211125 |