Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure (Data)
electrothermal piezoresistive cantilever sensors, parasitic feedthrough subtraction, particle mass concentration measurement, cigarette smoke exposure
| Document type | Datasets |
| Journal title / Source | |
| Persistent Identifier | https://doi.org/10.5281/zenodo.5720610 |