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Alignment-free characterization of 2D gratings

Madsen M.H, Boher P, Hansen P.E, Jørgensen J.F
Document type Article
Journal title / Source Applied Optics
Peer-reviewed article 1
Volume 55
Issue 2
Page numbers / Article number 317-322
Publisher's name OSA Publishing
Publisher's address (city only) Washington
Publication date 2016-1-7
DOI 10.1364/AO.55.000317
Web URL https://www.osapublishing.org/ao/abstract.cfm?uri=ao-55-2-317
Language English
Persistent Identifier https://arxiv.org/ftp/arxiv/papers/1509/1509.07623.pdf

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Name of Call / Funding Programme
EMPIR 2014: Industry