A hybrid 2D/3D inspection concept with smart routing optimisation for high throughput, high dynamic range and traceable critical dimension metrology
Barlow C., Jones C.W., O’Connor Ddimensional metrology, surface topography, hybrid measurement, high dynamic range, process control, inline measurement, calibration
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 29 |
| Issue | 7 |
| Page numbers / Article number | 074004 |
| Publisher's name | IOP Publishing |
| Publication date | 2018-5-23 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/aababd |
| Web URL | http://iopscience.iop.org/article/10.1088/1361-6501/aababd/meta |
| Language | English |