Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements
Behle H., Brand U.FEM, Mode analysis, diamond tips, piezoresistive Si-cantilever, roughness measurements
| Document type | Proceedings |
| Journal title / Source | SMSI 2020 - Sensors and Instrumentation |
| Volume | Chapter P2 |
| Issue | 2020 |
| Page numbers / Article number | 238-239 |
| Publisher's name | AMA Association for Sensors and Measurement |
| Publication date | 2020-6 |
| Conference name | SMSI 2020 |
| Conference date | 22-06-2020 to 25-06-2020 |
| Conference place | Nuremberg, Germany |
| ISBN | 978-3-9819376-2-6 |
| Language | English |
| Persistent Identifier | https://www.ama-science.org/proceedings/details/3729 |