Oxide Layer Mass Determination at the Silicon Sphere of the Avogadro Project
Busch Ingo, Danzebrink Hans-Ulrich, Kumrey Michael, Borys Michael, Bettin HorstAvogadro; density; ellipsometry; ?otation; silicon; silicon oxide; surface; X-ray re?ectometry (XRR)
Document type | Article |
Journal title / Source | IEEE Transactions on Instrumentation and Measurement |
Volume | 58 |
Issue | 4 |
Page numbers / Article number | 891-896 |
Publication date | 2009-4 |