Impact of Polymer-Assisted Epitaxial Graphene Growth on Various Types of SiC Substrates
Chatterjee A., Kruskopf M., Wundrack S., Hinze P., Pierz K., Stosch R., Scherer H.epitaxial graphene, polymer-assisted growth, spin-on deposition, miscut angle, SiC, concentration dependent
Document type | Article |
Journal title / Source | ACS Applied Electronic Materials |
Volume | 4 |
Issue | 11 |
Page numbers / Article number | 5317-5325 |
Publisher's name | American Chemical Society (ACS) |
Publication date | 2022-11 |
ISSN | 2637-6113, 2637-6113 |
DOI | 10.1021/acsaelm.2c00989 |
Language | English |