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Impact of Polymer-Assisted Epitaxial Graphene Growth on Various Types of SiC Substrates

Chatterjee A., Kruskopf M., Wundrack S., Hinze P., Pierz K., Stosch R., Scherer H.
Keywords:

epitaxial graphene, polymer-assisted growth, spin-on deposition, miscut angle, SiC, concentration dependent

Document type Article
Journal title / Source ACS Applied Electronic Materials
Volume 4
Issue 11
Page numbers / Article number 5317-5325
Publisher's name American Chemical Society (ACS)
Publication date 2022-11
ISSN 2637-6113, 2637-6113
DOI 10.1021/acsaelm.2c00989
Language English

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Information

Name of Call / Funding Programme
EMPIR 2018: SI Broader Scope