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EUV optical constants data set

Ciesielski R

Keywords:

EUV, optical constants, dataset


Document type	Datasets
Journal title / Source
Publication date	2021-10-28
DOI	10.5281/zenodo.5602719
Language	Abkhazian

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Information

Project title (JRP)

20IND04: ATMOC: Traceable metrology of soft X-ray to IR optical constants and nanofilms for advanced manufacturing

Name of Call / Funding Programme

EMPIR 2020: Industry