Effects of defocus on the transfer function of coherence scanning interferometry
Su R., Thomas M., Leach R., Coupland J.Imaging systems , Interferometry, Metrology , Calibration , Microscopy, Aberrations
| Document type | Article |
| Journal title / Source | Optics Letters |
| Volume | 43 |
| Issue | 1 |
| Page numbers / Article number | 82 |
| Publisher's name | The Optical Society |
| Publication date | 2017-12-21 |
| ISSN | 0146-9592, 1539-4794 |
| DOI | 10.1364/OL.43.000082 |
| Web URL | https://www.osapublishing.org/ol/fulltext.cfm?uri=ol-43-1-82 |
| Language | English |