Lens aberration compensation in interference microscopy
Su R., Thomas M., Liu M., Drs J., Bellouard Y., Pruss C., Coupland J., Leach R.Lens aberration interference microscopy
Document type | Article |
Journal title / Source | Optics and Lasers in Engineering |
Volume | 128 |
Page numbers / Article number | 106015 |
Publisher's name | Elsevier BV |
Publisher's address (city only) | Elsevier BV Radarweg 29 Amsterdam NX 1043 Netherlands |
Publication date | 2020-5 |
ISSN | 0143-8166 |
DOI | 10.1016/j.optlaseng.2020.106015 |
Language | English |