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Lens aberration compensation in interference microscopy

Su R., Thomas M., Liu M., Drs J., Bellouard Y., Pruss C., Coupland J., Leach R.
Keywords:

Lens aberration interference microscopy

Document type Article
Journal title / Source Optics and Lasers in Engineering
Volume 128
Page numbers / Article number 106015
Publisher's name Elsevier BV
Publisher's address (city only) Elsevier BV Radarweg 29 Amsterdam NX 1043 Netherlands
Publication date 2020-5
ISSN 0143-8166
DOI 10.1016/j.optlaseng.2020.106015
Language English

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Information

Name of Call / Funding Programme
EMPIR 2015: SI Broader Scope