Characterization of PillarHall test chip structures using a reflectometry technique
Danilenko A., Rastgou M., Manoocheri F., Kinnunen J., Korpelainen V., Lassila A., Ikonen E.reflectometry, PillarHall, modeling, conformal thin film
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 34 |
| Issue | 9 |
| Page numbers / Article number | 094006 |
| Publisher's name | IOP Publishing |
| Publisher's address (city only) | Bristol, United Kingdom |
| Publication date | 2023-6-19 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/acda54 |
| Language | English |