Modeling of coherence scanning interferometry using classical Fourier optics
de Groot P., Colonna de Lega X., Su R., Coupland J., Leach R.interferometry, interferometer, metrology, topography, coherence scanning interferometry,Fourier optics
| Document type | Article |
| Journal title / Source | Optical Engineering |
| Volume | 60 |
| Issue | 10 |
| Page numbers / Article number | 104106 |
| Publication date | 2021-10-18 |
| DOI | 10.1117/1.OE.60.10.104106 |
| Web URL | https://www.spiedigitallibrary.org/journals/optical-engineering/volume-60/issue-10/104106/Modeling-of-coherence-scanning-interferometry-using-classical-Fourier-optics/10.1117/1.OE.60.10.104106.full |
| Language | English |