Fourier optics modelling of coherence scanning interferometers
de Groot P., Colonna de Lega X., Su R., Coupland J., Leach R.Interferometry, interferometer, metrology, topography, CSI, Fourier optics
| Document type | Proceedings |
| Journal title / Source | Applied Optical Metrology IV - Proc. of SPIE |
| Volume | 11817 |
| Page numbers / Article number | 118170M |
| Publication date | 2021-8 |
| Conference name | SPIE Optical Engineering + Applications |
| Conference date | 01-08-2021 to 05-08-2021 |
| Conference place | San Diego, California |
| DOI | 10.1117/12.2595668 |
| Web URL | https://repository.lboro.ac.uk/articles/conference_contribution/Fourier_optics_modelling_of_coherence_scanning_interferometers/16948690 |
| Language | English |