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Linear systems characterization of the topographical spatial resolution of optical instruments

de Groot Peter J., Daouda Zoulaiha, Deck Leslie L., Colonna de Lega Xavier
Keywords:

instrument transfer function (ITF), lateral resolving power, Fizeau interferometers, confocal microscopes, interference microscopes,

Document type Article
Journal title / Source Applied Optics
Volume 63
Issue 15
Page numbers / Article number 4201
Publisher's name Optica Publishing Group
Publisher's address (city only) Washington, DC, United States
Publication date 2024-5-17
ISSN 1559-128X, 2155-3165
DOI 10.1364/AO.521868
Language English

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