Preliminary comparison of DUV scatterometry for CD and edge profile metrology on EUV masks
Endres J., Bodermann B., Dai G., Wurm M., Henn M.-A., Gross H., Scholze F., Diener A.| Document type | Proceedings |
| Journal title / Source | Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology |
| Page numbers / Article number | 695-700 |
| Publication date | 2014 |
| Conference name | FRINGE 2013 |
| Conference date | 8 - 11 September 2013 |
| Conference place | Nürtingen, Germany |
| DOI | 10.1007/978-3-642-36359-7_128 |
| ISBN | 978-3-642-36358-0 |
| Web URL | http://link.springer.com/chapter/10.1007%2F978-3-642-36359-7_128#page-1 |