Hybrid optical measurement technique for detection of defects in epitaxially grown 4H-SiC layers
Ermilova E., Weise M., Hertwig A.wide bandgap semconductors, 4H-SiC, defects, imaging ellipsometry, white light interference microscopy
| Document type | Proceedings |
| Journal title / Source | EPJ Web of Conferences |
| Volume | 266 |
| Page numbers / Article number | 10001 |
| Publisher's name | EDP Sciences |
| Publication date | 2022 |
| Conference name | EOS Annual Meeting (EOSAM 2022) |
| Conference date | 12-09-2022 to 16-09-2022 |
| Conference place | Porto |
| ISSN | 2100-014X |
| DOI | 10.1051/epjconf/202226610001 |
| Language | English |