Dataset for the publication "Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements"
surface topography measurement, piezoresistive devices, high-speed techniques, surface roughness, silicon, cantilevers
| Document type | Datasets |
| Journal title / Source | |
| Persistent Identifier | https://oar.ptb.de/resources/show/10.7795/720.20211124 |