Higher-Mode Contact Resonance Operation of a High-Aspect-Ratio Piezoresistive Cantilever Microprobe
Fahrbach M., Peiner E.MEMS, microprobe, thermal actuator, piezoresistive cantilever, contact resonance
| Document type | Proceedings |
| Journal title / Source | SMSI 2020 - Sensors and Instrumentation |
| Volume | Chapter A6 |
| Issue | 2020 |
| Page numbers / Article number | 89-90 |
| Publisher's name | AMA Association for Sensors and Measurement |
| Publication date | 2020-6 |
| Conference name | SMSI 2020 |
| Conference date | 22-06-2020 to 25-06-2020 |
| Conference place | Nuremberg, Germany |
| ISBN | 978-3-9819376-2-6 |
| Language | English |
| Persistent Identifier | https://www.ama-science.org/proceedings/details/3656 |