Influence of surface stress in the determination of the (220) lattice spacing of silicon
Ferroglio L., Mana G., Palmisano C., Zosi G.Document type | Article |
Journal title / Source | Metrologia |
Volume | 45 |
Publication date | 2008-2-5 |
Document type | Article |
Journal title / Source | Metrologia |
Volume | 45 |
Publication date | 2008-2-5 |