Direct approach to determine the size setting error and size resolution of an optical particle counter
Geisler Mathias, Hensey Garrycleanroom, light scattering, airborne particle counters, particle contamination, quality assurance, size resolution, calibration
Document type | Article |
Journal title / Source | Review of Scientific Instruments |
Volume | 91 |
Issue | 4 |
Page numbers / Article number | 045105 |
Publisher's name | AIP Publishing |
Publication date | 2020-4 |
ISSN | 0034-6748, 1089-7623 |
DOI | 10.1063/1.5142907 |
Language | English |