D5.2 - Optical and Tactile Measurements on SiC Sample Defects
Grundmann J., Bodemann B., Ermilova E., Hertwig A., Klapetek P., Pereira S., Rafighdoost J.defects, silicon carbide, imaging ellipsometry, coherent Fourier scatterometry, atomic force microscopy
| Document type | Proceedings |
| Journal title / Source | SMSI 2023 Conference |
| Volume | Lectures |
| Issue | D5.2 |
| Page numbers / Article number | 233 - 234 |
| Publisher's name | AMA Service GmbH, Von-Münchhausen-Str. 49, 31515 Wunstorf, Germany |
| Publisher's address (city only) | Wunstorf, Lower Saxony, Germany |
| Publication date | 2023-5 |
| Conference name | SMSI 2023 |
| Conference date | 08-05-2023 to 11-05-2023 |
| Conference place | Nürnberg |
| ISSN | 978-3-9819376-8-8 |
| DOI | 10.5162/SMSI2023/D5.2 |
| ISBN | 978-3-9819376-8-8 |
| Web URL | https://www.ama-science.org/proceedings/details/4426 |
| Language | English |