Optical and tactile measurements on SiC sample defects
Weise M., Ermilova E., Bodermann B., Grundmann J., Hertwig A., Klapetek P., Rafighdoost J., Pereira S.F.Journal of Sensors and Sensor Systems
Document type | Article |
Journal title / Source | Journal of Sensors and Sensor Systems |
Volume | 13 |
Issue | 1 |
Page numbers / Article number | 109-121 |
Publisher's name | Copernicus GmbH |
Publisher's address (city only) | Gottingen, Germany |
Publication date | 2024-5-22 |
ISSN | 2194-878X |
DOI | 10.5194/jsss-13-109-2024 |
Web URL | https://jsss.copernicus.org/articles/13/109/2024/ |
Language | English |