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Optical and tactile measurements on SiC sample defects

Weise M., Ermilova E., Bodermann B., Grundmann J., Hertwig A., Klapetek P., Rafighdoost J., Pereira S.F.
Keywords:

Journal of Sensors and Sensor Systems

Document type Article
Journal title / Source Journal of Sensors and Sensor Systems
Volume 13
Issue 1
Page numbers / Article number 109-121
Publisher's name Copernicus GmbH
Publisher's address (city only) Gottingen, Germany
Publication date 2024-5-22
ISSN 2194-878X
DOI 10.5194/jsss-13-109-2024
Web URL https://jsss.copernicus.org/articles/13/109/2024/
Language English

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Name of Call / Funding Programme
EMPIR 2020: Industry