Metrologie zur Identifikation und Charakterisierung von Materialdefekten an GaN- und SiC-Wafern
Grundmann Jana, Käseberg Tim , Bodermann BerndDGaO Proceedings
| Document type | Proceedings |
| Journal title / Source | Metrologie zur Identifikation und Charakterisierung von Materialdefekten an GaN- und SiC-Wafern |
| Volume | 1 |
| Issue | 1 |
| Page numbers / Article number | 2 |
| Publisher's name | Physikalisch-Technische Bundesanstalt (PTB) |
| Publisher's address (city only) | Braunschweig |
| Publication date | 2005-8-22 |
| Conference name | 123. annual meeting of DGaO |
| Conference date | 07-06-2022 to 11-06-2022 |
| Conference place | Germany |
| ISSN | 1614-8436 |
| Web URL | https://www.dgao-proceedings.de/download/123/123_a1.pdf |
| Language | English |
| Persistent Identifier | ISSN: 1614-8436 |