A virtual microscope for simulation of Nanostructures
Hansen P-E., Siaudinyte L.coherent Mueller ellipsometry, scatterometry, TracOptic
| Document type | Article |
| Journal title / Source | EPJ Web of Conferences |
| Volume | 266 |
| Page numbers / Article number | 10004 |
| Publisher's name | EDP Sciences |
| Publisher's address (city only) | Les Ulis cedex A, France |
| Publication date | 2022-10-13 |
| ISSN | 2100-014X |
| DOI | 10.1051/epjconf/202226610004 |
| Language | English |