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Traceable Coplanar Waveguide Calibrations on Fused Silica Substrates up to 110 GHz

Arz U., Kuhlmann K., Dziomba T., Hechtfischer G., Phung G., Schmückle F., Heinrich W.
Keywords:

Calibration, on-wafer, S-parameters, traceability, uncertainty budget

Document type Article
Journal title / Source IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES
Volume t.b.d.
Page numbers / Article number 1-10
Publisher's name IEEE
Publication date 2018-4-19
DOI 10.1109/TMTT.2019.2908857
Web URL https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8693763
Language English

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Information

Name of Call / Funding Programme
EMPIR 2014: Industry