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Correction for lateral distortion in coherence scanning interferometry

Henning Andrew, Giusca Claudiu, Forbes Alistair B, Smith Ian, Leach Richard, Coupland Jeremy, Mandal Rahul
Keywords:

Surface analysis, Measurement, Distortion correction

Document type Article
Journal title / Source CIRP Annals Manufacturing Technology
Volume 62
Issue 1
Page numbers / Article number 547 to 550
Publication date 2013
DOI 10.1016/j.cirp.2013.03.026
Web URL http://www.sciencedirect.com/science/article/pii/S0007850613000279

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Information

Name of Call / Funding Programme
EMRP A169: Call 2012 Metrology for Industry (II)