Reference-free grazing incidence x-ray fluorescence and reflectometry as a methodology for independent validation of x-ray reflectometry on ultrathin layer stacks and a depth-dependent characterization
Honicke P., Detlefs B., Kayser Y., Mühle U., Pollakowski B., Beckhoff B.nanolayer stacks
| Document type | Article |
| Journal title / Source | Journal of Vacuum Science & Technology A |
| Volume | 37 |
| Issue | 4 |
| Page numbers / Article number | 041502 |
| Publisher's name | American Vacuum Society |
| Publication date | 2019-7 |
| ISSN | 0734-2101, 1520-8559 |
| DOI | 10.1116/1.5094891 |
| Web URL | https://arxiv.org/abs/1903.01196 |
| Language | English |