Comparison of Fourier optics-based methods for modeling coherence scanning interferometry
Hooshmand Helia, Pahl Tobias, de Groot Peter J., Lehmann Peter, Pappas Athanasios, Su Rong, Leach Richard, Piano Samantasurface topography, coherence scanning interferometry, scattering, transfer function
| Document type | Article |
| Journal title / Source | Optical Engineering |
| Volume | 63 |
| Issue | 04 |
| Page numbers / Article number | 044102-1, 044102-12 |
| Publisher's name | SPIE-Intl Soc Optical Eng |
| Publisher's address (city only) | Bellingham, WA, United States |
| Publication date | 2024-4-12 |
| ISSN | 0091-3286 |
| DOI | 10.1117/1.OE.63.4.044102 |
| Web URL | https://www.spiedigitallibrary.org/journals/optical-engineering/volume-63/issue-04/044102/Comparison-of-Fourier-optics-based-methods-for-modeling-coherence-scanning/10.1117/1.OE.63.4.044102.full |
| Language | English |