Precision of diamond turning sinusoidal structures as measurement standards used to assess topography fidelity
Hüser Dorothee, Meeß Rudolf, Dai Gaoliang, Felgner André, Hahm Kai, Verhülsdonk Stefan, Feist Carsten, Gao Saidiamond turning, measurement standard, precision engineering, form deviation, material measure
| Document type | Article |
| Journal title / Source | Surface Topography: Metrology and Properties |
| Volume | 12 |
| Issue | 1 |
| Page numbers / Article number | 015014 |
| Publisher's name | IOP Publishing |
| Publisher's address (city only) | Bristol, United Kingdom |
| Publication date | 2024-3 |
| ISSN | 2051-672X |
| DOI | 10.1088/2051-672X/ad2c33 |
| Web URL | https://iopscience.iop.org/article/10.1088/2051-672X/ad2c33 |
| Language | English |