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In-situ characterisation of the probing force of contact stylus profilers using a micromachined nanoforce actuator

Li ZL, Ahbe TA, Gao SG, Brand UB
Document type Proceedings
Journal title / Source Proceedings of the 12th euspen International Conference
Peer-reviewed article 1
Volume 1
Issue International Conference European Society for Precision Engineering and Nanotechnology 12th
Page numbers / Article number 179-182
Publisher's name Euspen conference proceedings 
Publisher's address (city only) Leuven, Belgium
Publication date 2012-6
Conference name 12th International Conference European Society for Precision Engineering and Nanotechnology
Conference date 04-06-2012 to 08-06-2012
Conference place Nacka Strandsmässan, Stockholm, Sweden
Web URL http://training.euspen.eu/content/News-and-events/euspen-events/Stockholm%202012/proceedings/VolumePro1/VolumePro1/HTML/files/assets/basic-html/page179.html
Language English

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Name of Call / Funding Programme
EMRP A169: Call 2010 Industry