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IN-SITU TRACEABLE CHARACTERIZATION OF THE DEPTH SENSING SYSTEM OF A NANOINDENTATION INSTRUMENT

Li ZL, Brand UB, Popadic RP
Keywords:

Indentation instrument, depth sensing indentation, traceable calibration, homodyne laser interferometer

Document type Proceedings
Journal title / Source 11th International Symposium on Measurement and Quality Control 2013
Peer-reviewed article 1
Volume 11th International Symposium on Measurement and Quality Control 2013
Page numbers / Article number 1-4
Publisher's name IMEKO
Publication date 2013-9
Conference name 11th International Symposium on Measurement and Quality Control 2013
Conference date 11-09-2013 to 13-09-2013
Conference place Cracow-Kielce, Poland
ISBN 978-1-63266-817-2
Web URL http://www.imeko.org/publications/tc14-2013/IMEKO-TC14-2013-58.pdf
Language English

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Information

Name of Call / Funding Programme
EMRP A169: Call 2010 Industry