Study of uncertainties of height measurements of monoatomic steps on Si 5 × 5 using DFT
Jelínek Pavel, Klapetek Petr, Campbell Anna Charvátovádensity functional theory, atomic force microscopy, uncertainty
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 28 |
| Issue | 3 |
| Page numbers / Article number | 034005 |
| Publisher's name | IOP Publishing |
| Publisher's address (city only) | Temple Circus, Temple Way, Bristol, BS1 6BE, United Kingdom |
| Publication date | 2017-1-24 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/aa5075 |
| Language | English |