Inverted plasmonic lens design for nanometrology applications
Käseberg T., Siefke T., Kroker S., Bodermann B.Plasmonics, Metrology, Plasmonic lens, Microscopy, Nanostructures, Finite Element Method
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 31 |
| Issue | 7 |
| Page numbers / Article number | 074013 |
| Publisher's name | IOP Publishing |
| Publication date | 2020-5 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/ab7e6b |
| Language | English |