D5.1 - Compressed nano-FTIR Hyperspectral Imaging for Characterizing Defects in Semiconductors
Kästner B., Elster C., Hoehl A., Marschall M., Siebenkotten D., Wübbeler G., Rühl E., Wood S.power electronics, semiconductor defects, nano-FTIR, compressed spectroscopy, lowrank matrix reconstruction
Document type | Proceedings |
Journal title / Source | SMSI 2023 Conference |
Volume | Lectures |
Issue | D5.1 |
Page numbers / Article number | 231 - 232 |
Publisher's name | AMA Service GmbH, Von-Münchhausen-Str. 49, 31515 Wunstorf, Germany |
Publisher's address (city only) | Wunstorf, Lower Saxony, Germany |
Publication date | 2023-8 |
Conference name | SMSI 2023 |
Conference date | 08-05-2023 to 11-05-2023 |
Conference place | Nürnberg |
ISSN | 978-3-9819376-8-8 |
DOI | 10.5162/SMSI2023/D5.1 |
ISBN | 978-3-9819376-8-8 |
Web URL | https://www.ama-science.org/proceedings/details/4425 |
Language | English |