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Key criteria for the determination of geometrical properties of nano-objects under different adhesion levels

Lazzerini M., Yacoot A.
Keywords:

Nano-objects, AFM

Document type Technical report
Journal title / Source
Issue 2015
Publication date 2015-11
Web URL http://www.ptb.de/emrp/2618.html
Language English

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Information

Name of Call / Funding Programme
EMRP A169: Call 2011 Metrology for New Technologies