Large area high-speed metrology SPM system
Klapetek P, Valtr M, Picco L, Payton O D, Martinek J, Yacoot A, Miles Mscanning probe microscopy, high-speed SPM, metrology
| Document type | Article |
| Journal title / Source | Nanotechnology |
| Volume | 26 |
| Issue | 065501 |
| Publication date | 2015 |
| DOI | 10.1088/0957-4484/26/6/065501 |