Accurate tip characterization in critical dimension atomic force microscopy
Dai G., Korpelainen V., Xu L., Hahm K.atomic force microscopy (AFM), critical dimension (CD), tip characterization, tip correction, morphological operation, dimensional nanometrology, 3D nanometrology
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Publisher's name | IOP Publishing |
| Publication date | 2020-3-13 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/ab7fd2 |
| Language | English |