Ellipsometric porosimetry on pore-controlled TiO2 layers
Kraehnert Ralph, Hodoroaba Vasile-Dan, Ortel Erik, Rosu Dana-Maria, Hertwig AndreasSpectroscopic ellipsometry; Porous materials; Porosimetry; Multi-sample analysis; Thin film metrology
Document type | Article |
Journal title / Source | Applied Surface Science |
Publisher's name | Elsevier BV |
Publisher's address (city only) | New York, USA |
Publication date | 2016-11 |
ISSN | 0169-4332 |
DOI | 10.1016/j.apsusc.2016.11.055 |
Language | English |