Rigorous modeling of a confocal microscope
Krüger J., Wyss S., Gao S., Grundmann J., Bodermann B., Fu L., Birk A., Reichelt S., Frenner K.confocal microscope, BEM, FEM, FDTD, image formation
| Document type | Article |
| Journal title / Source | Modeling Aspects in Optical Metrology IX |
| Publisher's name | SPIE |
| Publisher's address (city only) | Bellingham, WA, United States |
| Publication date | 2023-8-10 |
| Web URL | https://oar.ptb.de/resources/show/10.7795/810.20240502 |
| Language | English |
| Persistent Identifier | https://doi.org/10.7795/810.20240502 |