Three-Dimensional Transfer Functions of Interference Microscopes [Dataset]
interference microscopy, coherence scanning interferometry, three-dimensional transfer function
| Document type | Article |
| Journal title / Source | Metrology |
| Volume | 1 |
| Issue | 2 |
| Page numbers / Article number | 122-141 |
| Publisher's name | MDPI AG |
| ISSN | 2673-8244 |
| DOI | 10.3390/metrology1020009 |
| Web URL | https://www.mdpi.com/2673-8244/1/2/9/htm |
| Language | English |