Physically based rendering method to derive realistic simulation of chromatic confocal measurements
Linnert D., Stavridis M., Neuschaefer-Rube U., Tutsch R.optical metrology, modeling, ray tracing, BRDF, chromatic confocal, systematic errors, traceability
| Document type | Article |
| Journal title / Source | Modeling Aspects in Optical Metrology IX |
| Publisher's name | SPIE |
| Publisher's address (city only) | Bellingham, WA, United States |
| Publication date | 2023-8-10 |
| Web URL | https://oar.ptb.de/resources/show/10.7795/810.20240617 |
| Language | English |
| Persistent Identifier | https://doi.org/10.7795/810.20240617 |