Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation
Lohr Leonhard M., Ciesielski Richard, Glabisch Sven, Schröder Sophia, Brose Sascha, Soltwisch Victorgrating characterization, EUV scatterometry, soft x-ray,
Document type | Article |
Journal title / Source | Applied Optics |
Volume | 62 |
Issue | 1 |
Page numbers / Article number | 117 |
Publisher's name | Optica Publishing Group |
Publisher's address (city only) | Washington, DC, United States |
Publication date | 2022-12-19 |
ISSN | 1559-128X, 2155-3165 |
DOI | 10.1364/AO.475566 |
Language | English |