Assessing the Alignment Accuracy of State-of-the-Art Deterministic Fabrication Methods for Single Quantum Dot Devices
Madigawa Abdulmalik A., Donges Jan N., Gaál Benedek, Li Shulun, Jacobsen Martin Arentoft, Liu Hanqing, Dai Deyan, Su Xiangbin, Shang Xiangjun, Ni Haiqiao, Schall Johannes, Rodt Sven, Niu Zhichuan, Gregersen Niels, Reitzenstein Stephan, Munkhbat Battulgaalignment accuracy, deterministic fabrication, single quantum dot, single photon source, InGaAs quantum dot
| Document type | Article |
| Journal title / Source | ACS Photonics |
| Volume | 11 |
| Issue | 3 |
| Page numbers / Article number | 1012-1023 |
| Publisher's name | American Chemical Society (ACS) |
| Publisher's address (city only) | Washington, DC, United States |
| Publication date | 2024-2-22 |
| ISSN | 2330-4022, 2330-4022 |
| DOI | 10.1021/acsphotonics.3c01368 |
| Web URL | https://arxiv.org/abs/2309.14795 |
| Language | English |