Coherence scanning interferometry: measurement and correction of 3D transfer and point-spread characteristics
Mandal R, Coupland J M, Leach R K, Mansfield D lFourier optics and signal processing; Instrumentation, measurement and metrology; Optical standards and testing; Surface measurements; Coherence tomography; Three-dimensional microscopy
Document type | Article |
Journal title / Source | Applied Optics |
Volume | 53 |
Issue | 8 |
Page numbers / Article number | 1554 to 1563 |
Publication date | 2014 |
DOI | 10.1364/AO.53.001554 |
Web URL | http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-53-8-1554 |